1 大连理工大学光电工程与仪器科学学院，辽宁 大连 116024
2 中国科学院理化技术研究所，北京 100190
3 中国科学院微电子研究所，北京 100029
对基于行波电极的硅-有机复合集成电光调制器进行研究，构建调制器的波导电极结构模型，分析特征阻抗和微波有效折射率对调制器频率响应的影响。通过对电极结构的仿真优化，完成调制器芯片的设计与制备，研究电光聚合物材料的片上极化工艺，得到高性能硅-有机复合集成电光调制器。对研制调制器电极的电学S（Scatter）参数进行测试，分析得到的电极特征阻抗和有效折射率与仿真设计结果基本相符。测试得到电光调制器的3 dB带宽大于50 GHz。
集成光学 电光调制器 硅-有机复合集成 行波电极 3 dB带宽 光学学报
2023, 43(23): 2313002
Author Affiliations
Abstract
1 Optoelectronics Research Centre, School of Science, Minzu University of China, Beijing 100081, China
2 Key Laboratory of Bio-inspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
High performance electro-optic modulator, as the key device of integrated ultra-wideband optical systems, have become the focus of research. Meanwhile, the organic-based hybrid electro-optic modulators, which make full use of the advantages of organic electro-optic (OEO) materials (e.g. high electro-optic coefficient, fast response speed, high bandwidth, easy processing/integration and low cost) have attracted considerable attention. In this paper, we introduce a series of high-performance OEO materials that exhibit good properties in electro-optic activity and thermal stability. In addition, the recent progress of organic-based hybrid electro-optic devices is reviewed, including photonic crystal-organic hybrid (PCOH), silicon-organic hybrid (SOH) and plasmonic-organic hybrid (POH) modulators. A high-performance integrated optical platform based on OEO materials is a promising solution for growing high speeds and low power consumption in compact sizes.High performance electro-optic modulator, as the key device of integrated ultra-wideband optical systems, have become the focus of research. Meanwhile, the organic-based hybrid electro-optic modulators, which make full use of the advantages of organic electro-optic (OEO) materials (e.g. high electro-optic coefficient, fast response speed, high bandwidth, easy processing/integration and low cost) have attracted considerable attention. In this paper, we introduce a series of high-performance OEO materials that exhibit good properties in electro-optic activity and thermal stability. In addition, the recent progress of organic-based hybrid electro-optic devices is reviewed, including photonic crystal-organic hybrid (PCOH), silicon-organic hybrid (SOH) and plasmonic-organic hybrid (POH) modulators. A high-performance integrated optical platform based on OEO materials is a promising solution for growing high speeds and low power consumption in compact sizes.
Journal of Semiconductors
2022, 43(10): 101301
Author Affiliations
Abstract
1 School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian, 116024, China
2 Photonics Research Group, Department of Information Technology, Ghent University-IMEC, 9000 Ghent, Belgium
3 No. 38 Research Institute, China Electronics Technology Group Corporation, Hefei, 230088, China
4 Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, 100190, China
The polymer waveguide optical biosensor based on the Mach-Zehnder interferometer (MZI) by using spectral splitting effect is investigated. The MZI based biosensor has two unequal width sensing arms. With the different mode dispersion responses of the two-arm waveguides to the cladding refractive index change, the spectral splitting effect of the output interference spectrum is obtained, inducing a very high sensitivity. The influence of the different mode dispersions between the two-arm waveguides on the spectral splitting characteristic is analyzed. By choosing different lengths of the two unequal width sensing arms, the initial dip wavelength of the interference spectrum and the spectral splitting range can be controlled flexibly. The polymer waveguide optical biosensor is designed, and its sensing property is analyzed. The results show that the sensitivity of the polymer waveguide optical biosensor by using spectral splitting effect is as high as 104 nm/RIU, with an improvement of 2–3 orders of magnitude compared with the slot waveguide based microring biosensor.
Optical biosensor Optical biosensor integrated waveguide integrated waveguide spectral splitting spectral splitting sensitivity sensitivity Photonic Sensors
2017, 7(2): 131–139
